PIN detector arrays and integrated readout circuitry on high-resistivity float-zone silicon

Journal Article · Wed Jun 01 00:00:00 EDT 1994 · IEEE Transactions on Electron Devices (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/16.293300· OSTI ID:7046876

Snoeys, W; Plummer, J ^[1]; Parker, S; Kenney, C ^[2]

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1. Stanford Univ., CA (United States). Center for Integrated Systems
2. Univ. of Hawaii, Honolulu, HI (United States). Dept. of Physics

A new silicon PIN-diode-based pixel detector for ionizing particles integrating a two-dimensional array of detecting elements with readout circuitry has been developed and extensively tested. The signal charge is collected on a low-capacitance electrode avoiding loss of charge into the local readout circuitry within each pixel. The spatial resolution for a given circuitry size is optimized. The approach required back side patterning of the wafer, the only nonconventional part in the Stanford BiCMOS based manufacturing process. Thirteen masks on the front side of the wafer and three on the back yielded both CMOS readout circuitry and detecting elements. A gettering step helped obtain a high minority carrier lifetime (500 [mu]s). Test results obtained by infrared illumination, gamma rays, and high-energy particles, which have been described in detail elsewhere, will be summarized. They include a signal to single-channel-noise performance of about 150 to 1 for a minimum ionizing particle, which is an order of magnitude better than silicon strip detectors currently used, and a record-breaking spatial resolution in the direction of smallest pixel pitch (standard deviation of about 1.8 [mu]m). The authors describe the device and chip operation of the new detector in detail.

• OSTI ID: 7046876
• Journal Information: IEEE Transactions on Electron Devices (Institute of Electrical and Electronics Engineers); (United States), Vol. 41:6; ISSN 0018-9383
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
SI SEMICONDUCTOR DETECTORS
DESIGN
READOUT SYSTEMS
HIGH ENERGY PHYSICS
JUNCTION DIODES
OPERATION
PERFORMANCE TESTING
MEASURING INSTRUMENTS
PHYSICS
RADIATION DETECTORS
SEMICONDUCTOR DETECTORS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
TESTING
440104* - Radiation Instrumentation- High Energy Physics Instrumentation