Ion beam induced charge collection (IBICC) from integrated circuit test structures using a 10 MeV carbon microbeam
- Ion Beam Modification and Analysis Laboratory, Department of Physics, University of North Texas, Denton, Texas 76203 (United States)
As feature sizes of Integrated Circuits (ICs) continue to shrink, the sensitivity of these devices, particularly SRAMs and DRAMs, to natural radiation is increasing. In this paper, the Ion Beam Induced Charge Collection (IBICC) technique is utilized to simulate neutron-induced Si recoil effects in ICs. The IBICC measurements, conducted at the Sandia National Laboratories, employed a 10 MeV carbon microbeam with 1{mu}m diameter spot to scan test structures on specifically designed ICs. With the aid of IC layout information, an analysis of the charge collection efficiency from different test areas is presented. {copyright} {ital 1999 American Institute of Physics.}
- Research Organization:
- Sandia National Laboratory
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 703995
- Report Number(s):
- CONF-981122--
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 475; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
Similar Records
Ion beam induced charge collection (IBICC) from integrated circuit test structures using a 10 MeV carbon microbeam
Ion Beam Induced Charge Collection (IBICC) from Integrated Circuit Test Structures Using a 10 MeV Carbon Microbeam
Ion Beam Induced Charge Collection (IBICC) Studies of Integrated Circuits Using a 10MeV Carbon Microbeam
Journal Article
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Thu Jun 10 00:00:00 EDT 1999
· AIP Conference Proceedings
·
OSTI ID:21205542
Ion Beam Induced Charge Collection (IBICC) from Integrated Circuit Test Structures Using a 10 MeV Carbon Microbeam
Conference
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Tue Nov 17 23:00:00 EST 1998
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OSTI ID:1917
Ion Beam Induced Charge Collection (IBICC) Studies of Integrated Circuits Using a 10MeV Carbon Microbeam
Conference
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Tue Sep 29 00:00:00 EDT 1998
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OSTI ID:762