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U.S. Department of Energy
Office of Scientific and Technical Information

Zinc oxyfluoride transparent conductor

Patent ·
OSTI ID:7028482

Transparent, electrically conductive and infrared-reflective films of zinc oxyfluoride are produced by chemical vapor deposition from vapor mixtures of zinc, oxygen and fluorine-containing compounds. The substitution of fluorine for some of the oxygen in zinc oxide results in dramatic increases in the electrical conductivity. For example, diethyl zinc, ethyl alcohol and hexafluoropropene vapors are reacted over a glass surface at 400 C to form a visibly transparent, electrically conductive, infrared reflective and ultraviolet absorptive film of zinc oxyfluoride. Such films are useful in liquid crystal display devices, solar cells, electrochromic absorbers and reflectors, energy-conserving heat mirrors, and antistatic coatings. 8 figures.

Assignee:
Harvard College, Cambridge, MA (United States)
Patent Number(s):
A; US 4990286
Application Number:
PPN: US 7-324808
OSTI ID:
7028482
Country of Publication:
United States
Language:
English