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Title: Chemical vapor deposition of fluorine-doped zinc oxide

Abstract

Fims of fluorine-doped zinc oxide are deposited from vaporized precursor compounds comprising a chelate of a dialkylzinc, such as an amine chelate, an oxygen source, and a fluorine source. The coatings are highly electrically conductive, transparent to visible light, reflective to infrared radiation, absorbing to ultraviolet light, and free of carbon impurity.

Inventors:
 [1];  [2];  [3]
  1. (Cambridge, MA)
  2. (Avon Lake, OH)
  3. (Santa Clara, CA)
Publication Date:
OSTI Identifier:
873024
Patent Number(s):
US 6071561
Application Number:
09/242,093
Assignee:
President and Fellows of Harvard College (Cambridge, MA) OSTI
DOE Contract Number:  
XAN-4-13318-05
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
chemical; vapor; deposition; fluorine-doped; zinc; oxide; fims; deposited; vaporized; precursor; compounds; comprising; chelate; dialkylzinc; amine; oxygen; source; fluorine; coatings; highly; electrically; conductive; transparent; visible; light; reflective; infrared; radiation; absorbing; ultraviolet; free; carbon; impurity; doped zinc; compounds comprising; zinc oxide; ultraviolet light; chemical vapor; electrically conductive; vapor deposition; visible light; infrared radiation; precursor compounds; precursor compound; highly electrically; fluorine-doped zinc; oxygen source; violet light; /427/

Citation Formats

Gordon, Roy G., Kramer, Keith, and Liang, Haifan. Chemical vapor deposition of fluorine-doped zinc oxide. United States: N. p., 2000. Web.
Gordon, Roy G., Kramer, Keith, & Liang, Haifan. Chemical vapor deposition of fluorine-doped zinc oxide. United States.
Gordon, Roy G., Kramer, Keith, and Liang, Haifan. Tue . "Chemical vapor deposition of fluorine-doped zinc oxide". United States. https://www.osti.gov/servlets/purl/873024.
@article{osti_873024,
title = {Chemical vapor deposition of fluorine-doped zinc oxide},
author = {Gordon, Roy G. and Kramer, Keith and Liang, Haifan},
abstractNote = {Fims of fluorine-doped zinc oxide are deposited from vaporized precursor compounds comprising a chelate of a dialkylzinc, such as an amine chelate, an oxygen source, and a fluorine source. The coatings are highly electrically conductive, transparent to visible light, reflective to infrared radiation, absorbing to ultraviolet light, and free of carbon impurity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {6}
}

Patent:

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