Application of diamond-like carbon film as protection and antireflection coatings of ZnS elements

Journal Article · Fri Apr 01 00:00:00 EST 1994 · Optical Engineering; (United States)

DOI:https://doi.org/10.1117/12.163158· OSTI ID:7028481

Zhang, G; Guo, L J; Liu, Z; Zheng, X ^[1]

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1. Northwestern Polytechnical Univ., Xi'an (China). Dept. of Materials Science and Engineering

In the present study, the rf plasma chemical vapor deposition technique is applied to directly deposit a diamond-like carbon (DLC) film onto a zinc sulfide (ZnS) substrate with excellent adhesion. Great attention is paid to the investigation of the correlation between the deposition process parameters and the structure and properties of DLC film, and of the optical spectrum characteristic of DLC films appropriate to protect IR window materials. The experimental results show that the refractive index, microhardness, and growth rate of DLC films increase with increasing dc bias voltage. The IR transmittance of the ZnS substrate with DLC film has been increased to some extent between 3 and 12 [mu]m.

• OSTI ID: 7028481
• Journal Information: Optical Engineering; (United States), Vol. 33:4; ISSN 0091-3286
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
CHEMICAL VAPOR DEPOSITION
ZINC SULFIDES
ANTIREFLECTION COATINGS
PROTECTIVE COATINGS
EXPERIMENTAL DATA
LIGHT TRANSMISSION
OPTICAL EQUIPMENT
OPTICAL PROPERTIES
CHALCOGENIDES
CHEMICAL COATING
COATINGS
DATA
DEPOSITION
ELEMENTS
EQUIPMENT
INFORMATION
INORGANIC PHOSPHORS
NONMETALS
NUMERICAL DATA
PHOSPHORS
PHYSICAL PROPERTIES
SULFIDES
SULFUR COMPOUNDS
SURFACE COATING
ZINC COMPOUNDS
360601* - Other Materials- Preparation & Manufacture