YBa sub 2 Cu sub 3 O sub 7 minus x to Si interconnection for hybrid superconductor/ semiconductor integration
- Electromagnetic Technology Division, National Institute of Standards and Technology, Boulder, Colorado 80303 (United States)
We have successfully made low resistance contacts between high-quality films of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} (YBCO) and single-crystal Si substrates through Ag-Au interconnections. The YBCO films were deposited by laser ablation on an epitaxial yttria-stabilized zirconia buffer layer on Si and had zero-resistance critical temperatures of 83--85 K after patterning into lines. Specific contact resistivities (resistance-area products) of the YBCO to Si interconnection, limited by the Au to Si interface, of 10{sup {minus}6} {Omega} cm{sup 2} were achieved on heavily doped Si after deposition and patterning of the YBCO film. This demonstrates the use of high-temperature superconductors as a wiring layer compatible with conventional Si metal-oxide-semiconductor processing.
- DOE Contract Number:
- AI05-89ER14044
- OSTI ID:
- 7028245
- Journal Information:
- Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 61:18; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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426000 -- Engineering-- Components
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CONDUCTOR DEVICES
CONNECTORS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
EQUIPMENT
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
WIRES
YTTRIUM COMPOUNDS
YTTRIUM OXIDES