Thermal conductivity of sputtered and evaporated SiO[sub 2] and TiO[sub 2] optical coatings

Journal Article · Mon Jul 18 04:00:00 EDT 1994 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.112355· OSTI ID:7028214

Cahill, D G ^[1]; Allen, T H ^[2]

---

1. Department of Materials Science and Engineering and the Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801 (United States)
2. Optical Coatings Laboratory, Inc., Santa Rosa, California 95407-7397 (United States)

The thermal conductivity of SiO[sub 2] and TiO[sub 2] optical coatings are measured in the temperature range 80--400 K. For SiO[sub 2], the thermal conductivity of sputtered and evaporated films are 77% and 55% of the bulk value, respectively, independent of temperature. Similarly, the thermal conductivity of evaporated TiO[sub 2] is 63% of the conductivity of sputtered TiO[sub 2].

• DOE Contract Number: FG02-91ER45439
• OSTI ID: 7028214
• Journal Information: Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 65:3; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360606* -- Other Materials-- Physical Properties-- (1992-)
CHALCOGENIDES
EVAPORATION
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SILICON COMPOUNDS
SILICON OXIDES
SPUTTERING
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE
TEMPERATURE RANGE 0065-0273 K
TEMPERATURE RANGE 0273-0400 K
THERMAL CONDUCTIVITY
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS