Advances in molecular and three-dimensional visualization aspects of secondary ion mass spectrometry
Thesis/Dissertation
·
OSTI ID:7020366
Chemical compositions of microstructures on material surfaces can be obtained with secondary ion mass spectrometry (SIMS). Direct molecular ion detection has been advanced by the evolution of time-of-flight secondary ion mass spectrometry (TOF-SIMS), and three dimensional (3-D) image depth profiling has been achieved with a computerized digital image acquisition system coupled to an ion microscope. Chapter IV focuses on materials science applications. The volume rendered 3-D SIMS images provides comprehensive view of complex microstructures in microelectronics devices. Rendering parameters are optimized for improving the visualization of microstructures, such as B dopant and Al metallization lines. Transparency settings were varied to differentiate elemental Si and silicon oxide regions due to the differences in Si ion yields. Image depth profiles also were obtained from patterned conductive polymer films. Analysis of ultrashallow dopant distributions is required by state-of-the-art ultra large scale integration (ULSI) technology. Atomic mixing set the fundamental depth resolution of SIMS depth profiling. In the latter part of this chapter, the optimization of a quadrupole SIMS for the analysis of ultrashallow junction materials required by sub-[mu]m devices is described.
- Research Organization:
- North Carolina Univ., Chapel Hill, NC (United States)
- OSTI ID:
- 7020366
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
CHEMICAL ANALYSIS
COMPUTER GRAPHICS
DATA ACQUISITION SYSTEMS
DYNAMIC MASS SPECTROMETERS
FILMS
IMAGE PROCESSING
ION MICROPROBE ANALYSIS
ION MICROSCOPES
MASS SPECTROMETERS
MASS SPECTROSCOPY
MEASURING INSTRUMENTS
MICROANALYSIS
MICROSCOPES
MOLECULAR STRUCTURE
NONDESTRUCTIVE ANALYSIS
POLYMERS
PROCESSING
SPECTROMETERS
SPECTROSCOPY
THIN FILMS
TIME-OF-FLIGHT MASS SPECTROMETERS
TIME-OF-FLIGHT SPECTROMETERS
360602* -- Other Materials-- Structure & Phase Studies
CHEMICAL ANALYSIS
COMPUTER GRAPHICS
DATA ACQUISITION SYSTEMS
DYNAMIC MASS SPECTROMETERS
FILMS
IMAGE PROCESSING
ION MICROPROBE ANALYSIS
ION MICROSCOPES
MASS SPECTROMETERS
MASS SPECTROSCOPY
MEASURING INSTRUMENTS
MICROANALYSIS
MICROSCOPES
MOLECULAR STRUCTURE
NONDESTRUCTIVE ANALYSIS
POLYMERS
PROCESSING
SPECTROMETERS
SPECTROSCOPY
THIN FILMS
TIME-OF-FLIGHT MASS SPECTROMETERS
TIME-OF-FLIGHT SPECTROMETERS