Single-target magnetron sputter deposition of high-T/sub c/ superconducting Bi-Sr-Ca-Cu-O thin films

Journal Article · Tue Nov 15 00:00:00 EST 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342389· OSTI ID:7016439

Dhere, N G; Goral, J P; Mason, A R; Dhere, R G; Ono, R H

Single-target RF magnetron sputtering was used to deposit superconducting thin films of Bi-Sr-Ca-Cu-O with a T/sub c//sub 0/ above 80 K. Varying P/sub =/ modified the concentrations of Bi, Cu, and O in the films by 10%--20%. Higher annealing temperatures, especially with brief melting, favored the formation of the higher T/sub c/ phases. Tetragonal phases (6- and 75-K T/sub c/ ), with a = 3.8097 A, c = 24.607 A, and Bi/sub 2/ Sr/sub 2/ CuO/sub 6/ composition, and a = 3.812 A, c = 30.66 A, and Bi/sub 2/ Sr/sub 2-//sub x/ Ca/sub 1+//sub x/ Cu/sub 2/ O/sub 8/ composition, were identified. 70--84 K films contained large proportions of a new tetragonal phase, with a = 3.81 A and c = 55.23 A.

• Research Organization: Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
• OSTI ID: 7016439
• Journal Information: J. Appl. Phys.; (United States), Vol. 64:10
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BISMUTH OXIDES
CHEMICAL COMPOSITION
TRANSITION TEMPERATURE
CALCIUM OXIDES
COPPER OXIDES
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
FABRICATION
ANNEALING
CRYSTAL STRUCTURE
EXPERIMENTAL DATA
MAGNETRONS
TETRAGONAL LATTICES
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
CALCIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CRYSTAL LATTICES
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
HEAT TREATMENTS
INFORMATION
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity