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Isotope-selective infrared multiple photon decomposition of hexafluorodisilane

Journal Article · · J. Phys. Chem.; (United States)
DOI:https://doi.org/10.1021/j100280a052· OSTI ID:7005592

The infrared multiple photon decomposition of hexafluorodisilane has been studied with a CO/sub 2/ TEA laser with the intention of silicon isotope separation. The products were SiF/sub 4/ (55% in silicon balance), a trace of Si/sub 3/F/sub 8/, and a whitish film. SiF/sub 4/ was found to be considerably enriched with /sup 30/Si in the decomposition at P(6)-P(20) lines of the 10.6 ..mu..m CO/sub 2/ band. Product yields and enrichment factors were examined as functions of irradiation wavenumber, laser fluence, and Si/sub 2/F/sub 6/ pressure. Decomposition occurred at a fluence as low as 0.15 J cm/sup -2/. The isotope content of /sup 30/Si in SiF/sub 4/ was nearly 50%, for example, in the irradiation of 2 Torr of natural Si/sub 2/F/sub 6/ with laser radiation at 951.19 cm/sup -1/ and 0.25 J cm/sup -2/. On the basis of the observed results, large-scale separation of /sup 30/Si was carried out by using a flow system and a high-repetition laser. SiF/sub 4/ with a /sup 30/Si content of 33% was produced at a rate of 1.47 g/h.

Research Organization:
Institute of Physical and Chemical Research, Saitama, Japan
OSTI ID:
7005592
Journal Information:
J. Phys. Chem.; (United States), Journal Name: J. Phys. Chem.; (United States) Vol. 90:22; ISSN JPCHA
Country of Publication:
United States
Language:
English