Processing effects in the sol-gel preparation of PZT dried gels, powders, and ferroelectric thin layers
- Illinois Univ., Urbana, IL (United States). Materials Research Lab.
This paper reports on infrared spectroscopy that was used to monitor and characterize solutions used in the preparation of PZT 53/47 powders, dried gels, and thin layers deposited on platinized silicon substrates. It was found that careful control of the chemistry of the precursor solutions, in particular the control of the formation of esters and their elimination, resulted in reproducible solutions which could be used to prepare thin layers with superior properties. In addition, it was found that phase development and microstructure were related to the precursor chemistry. Single-phase perovskite layers with uniform microstructures resulted from ester-free solutions and were suitable for ferroelectric applications (P[sub r] [approximately] 22 [mu]C/cm[sup 2], E[sub c] [approximately] 80 kV/cm, K [approximately] 800, tan [delta] [approximately] 0.01).
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 7001773
- Journal Information:
- Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 75:11; ISSN 0002-7820; ISSN JACTAW
- Country of Publication:
- United States
- Language:
- English
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360201* -- Ceramics
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& Refractories-- Preparation & Fabrication
360202 -- Ceramics
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& Refractories-- Structure & Phase Studies
360204 -- Ceramics
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664200 -- Spectra of Atoms & Molecules & their Interactions with Photons-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
CHEMICAL COMPOSITION
CONTROL
CRYSTAL STRUCTURE
DIAGRAMS
DISPERSIONS
ELEMENTS
FERROELECTRIC MATERIALS
FILMS
INFRARED SPECTRA
LEAD COMPOUNDS
MICROSTRUCTURE
MINERALS
MIXTURES
OXIDE MINERALS
OXYGEN COMPOUNDS
PEROVSKITE
PEROVSKITES
PHASE DIAGRAMS
POWDERS
PRECURSOR
PROCESS CONTROL
PZT
SEMIMETALS
SILICON
SOL-GEL PROCESS
SOLID SOLUTIONS
SOLUTIONS
SPECTRA
SUBSTRATES
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS