Processing effects in the sol-gel preparation of PZT dried gels, powders, and ferroelectric thin layers
- Illinois Univ., Urbana, IL (United States). Materials Research Lab.
This paper reports on infrared spectroscopy that was used to monitor and characterize solutions used in the preparation of PZT 53/47 powders, dried gels, and thin layers deposited on platinized silicon substrates. It was found that careful control of the chemistry of the precursor solutions, in particular the control of the formation of esters and their elimination, resulted in reproducible solutions which could be used to prepare thin layers with superior properties. In addition, it was found that phase development and microstructure were related to the precursor chemistry. Single-phase perovskite layers with uniform microstructures resulted from ester-free solutions and were suitable for ferroelectric applications (P[sub r] [approximately] 22 [mu]C/cm[sup 2], E[sub c] [approximately] 80 kV/cm, K [approximately] 800, tan [delta] [approximately] 0.01).
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 7001773
- Journal Information:
- Journal of the American Ceramic Society; (United States), Vol. 75:11; ISSN 0002-7820
- Country of Publication:
- United States
- Language:
- English
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74 ATOMIC AND MOLECULAR PHYSICS
FERROELECTRIC MATERIALS
MICROSTRUCTURE
PHASE DIAGRAMS
THIN FILMS
PEROVSKITE
PZT
POWDERS
SOL-GEL PROCESS
SILICON
SUBSTRATES
SOLID SOLUTIONS
INFRARED SPECTRA
CHEMICAL COMPOSITION
PRECURSOR
PROCESS CONTROL
CONTROL
CRYSTAL STRUCTURE
DIAGRAMS
DISPERSIONS
ELEMENTS
FILMS
LEAD COMPOUNDS
MINERALS
MIXTURES
OXIDE MINERALS
OXYGEN COMPOUNDS
PEROVSKITES
SEMIMETALS
SOLUTIONS
SPECTRA
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS
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