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Modifying structure and properties of optical films by coevaporation

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.573610· OSTI ID:6998541
Coevaporated e-beam films show modification of structure and properties that depend on composition. In pure zirconia films, x-ray diffraction indicates two crystal phases present and scanning electron microscopy (SEM) shows a columnar structure. The pore fractions in these films can exceed 25%. The admixture of small amounts of silica (<20% by volume) results in films having a single crystalline phase. At volume fractions of silica >20%, the films show an amorphous structure lacking columnar growth. Measurements of refractive index and thickness as a function of composition indicate an initial decrease in porosity with increasing silica content. A simple model gives the porosity of the films as a function of composition. In addition, the mixed films show greater index stability, decreased surface roughness, and decreased optical scatter.
Research Organization:
National Bureau of Standards, Gaithersburg, Maryland 20899
OSTI ID:
6998541
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Journal Issue: 6 Vol. 4:6; ISSN JVTAD
Country of Publication:
United States
Language:
English