Modifying structure and properties of optical films by coevaporation
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
Coevaporated e-beam films show modification of structure and properties that depend on composition. In pure zirconia films, x-ray diffraction indicates two crystal phases present and scanning electron microscopy (SEM) shows a columnar structure. The pore fractions in these films can exceed 25%. The admixture of small amounts of silica (<20% by volume) results in films having a single crystalline phase. At volume fractions of silica >20%, the films show an amorphous structure lacking columnar growth. Measurements of refractive index and thickness as a function of composition indicate an initial decrease in porosity with increasing silica content. A simple model gives the porosity of the films as a function of composition. In addition, the mixed films show greater index stability, decreased surface roughness, and decreased optical scatter.
- Research Organization:
- National Bureau of Standards, Gaithersburg, Maryland 20899
- OSTI ID:
- 6998541
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Journal Issue: 6 Vol. 4:6; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
CHEMICAL COMPOSITION
CRYSTAL STRUCTURE
LIGHT SCATTERING
MICROSTRUCTURE
MINERALS
OPTICAL PROPERTIES
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POROSITY
REFRACTIVITY
ROUGHNESS
SCATTERING
SILICA
SILICON COMPOUNDS
SILICON OXIDES
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
CHEMICAL COMPOSITION
CRYSTAL STRUCTURE
LIGHT SCATTERING
MICROSTRUCTURE
MINERALS
OPTICAL PROPERTIES
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POROSITY
REFRACTIVITY
ROUGHNESS
SCATTERING
SILICA
SILICON COMPOUNDS
SILICON OXIDES
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES