Monte Carlo simulation of kilovolt electron transport in solids

Journal Article · Thu Mar 15 04:00:00 EST 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.345415· OSTI ID:6993977

Martinez, J D; Mayol, R; Salvat, F ^[1]

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1. Facultat de Fisica (ECM), Universitat de Barcelona, Diagonal 647, E 08028 Barcelona, Spain (ES)

A Monte Carlo procedure to simulate the penetration and energy loss of low-energy electron beams through solids is presented. Elastic collisions are described by using the method of partial waves for the screened Coulomb field of the nucleus. The atomic charge density is approximated by an analytical expression with parameters determined from the Dirac--Hartree--Fock--Slater self-consistent density obtained under Wigner--Seitz boundary conditions in order to account for solid-state effects; exchange effects are also accounted for by an energy-dependent local correction. Elastic differential cross sections are then easily computed by combining the WKB and Born approximations to evaluate the phase shifts. Inelastic collisions are treated on the basis of a generalized oscillator strength model which gives inelastic mean free paths and stopping powers in good agreement with experimental data. This scattering model is accurate in the energy range from a few hundred eV up to about 50 keV. The reliability of the simulation method is analyzed by comparing simulation results and experimental data from backscattering and transmission measurements.

• OSTI ID: 6993977
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 67:6; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

654001* -- Radiation & Shielding Physics-- Radiation Physics
Shielding Calculations & Experiments
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
BEAMS
BOUNDARY CONDITIONS
ELASTIC SCATTERING
ELECTRON BEAMS
ENERGY LOSSES
ENERGY RANGE
EXCHANGE INTERACTIONS
HARTREE-FOCK METHOD
INELASTIC SCATTERING
INTERACTIONS
KEV RANGE
LEPTON BEAMS
LOSSES
MONTE CARLO METHOD
OSCILLATOR STRENGTHS
PARTICLE BEAMS
SCATTERING
SELF-CONSISTENT FIELD
SIMULATION
SOLIDS
WIGNER-SEITZ METHOD