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High critical current density ultrathin YBa sub 2 Cu sub 3 O sub x films made by a modified rf-magnetron sputtering technique

Journal Article · · Journal of Applied Physics; (USA)
DOI:https://doi.org/10.1063/1.345503· OSTI ID:6986180
; ;  [1]
  1. Low Temperature Division, Faculty of Applied Physics, University of Twente, 7500 AE Enschede, The Netherlands (NL)
High-quality {cflx {ital c}}-axis oriented thin films have been grown {ital in} {ital situ} on (100) surfaces of ZrO{sub 2} , SrTiO{sub 3} , and MgO. Sharp transitions to superconductivity were observed with {ital T}{sub {ital c},off} of 87--89.5 K for films thicker than 70 A. The critical current density at 77.3 K was found to be strongly dependent on the film thickness. A maximum value was found for a 100-A film with 8{times}10{sup 6} A/cm{sup 2} at 77.3 K. On atomically flat single-crystal MgO substrates, films as thin as 15 A revealed a full transition to superconductivity above 45.5 K. The superconducting properties of the films turned out to be quite insensitive to the deposition parameters, such as substrate temperature, oxygen partial pressure, sputter power, etc.
OSTI ID:
6986180
Journal Information:
Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 67:5; ISSN 0021-8979; ISSN JAPIA
Country of Publication:
United States
Language:
English