Optical diagnostic studies of trimethyl phosphine-containing radio-frequency discharges

Journal Article · Tue Dec 01 04:00:00 EST 1987 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF01030486· OSTI ID:6978563

Brown, L; Donnelly, V M; McCrary, V R

The authors have investigated the decomposition of P(CH/sub 3/)/sub 3/ in 13-MHz, radio-frequency discharges in He and H/sub 2/. Relative concentrations of atomic phosphorus were estimated actinometrically by measuring P emission intensities, relative to Ar, while quantitative, relative P/sub 2/ number densities were measured by ArF excimer laser-induces fluorescence. A radiative lifetime of 10.5 +/- 1.0 ns was measured for the v' = 11 level of the C/sup 1/..sigma../sub u//sup +/ state, resonantly excited by the 193 nm laser. Additions of P(CH/sub 3/)/sub 3/ to He discharges reduce the electron energy distribution as sensed by the quenching of optical emission from He and trace amounts of added Ar, and thereby causes the overall process P(CH/sub 3/)/sub 3/ ..-->.. P + 3CH/sub 3/ to occur with maximum efficiency at very low (approx. 0.5%) P(CH/sub 3/)/sub 3/ additions. H/sub 2/ discharges are 10 times less efficient at producing P and P/sub 2/, due to the lower electron energies, and possibly to hydrogenation reactions. P/sub 2/ productions in both He and H/sub 2/ discharges increases linearly with pressure up to at least 10 torr. Under optimum conditions, plasma decomposition of P(CH/sub 3/)/sub 3/ (and by analogy PH/sub 3/) promises to be an attractive source of phosphorus for growth of phosphorus-containing thin films.

• Research Organization: AT and T Bell Lab., Murray Hill, NJ (USA)
• OSTI ID: 6978563
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 7:4; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ARGON
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DECOMPOSITION
DEPOSITION
EFFICIENCY
ELECTRIC DISCHARGES
ELEMENTS
EMISSION SPECTRA
EMISSION SPECTROSCOPY
ENERGY EFFICIENCY
ENERGY LEVELS
ENERGY-LEVEL TRANSITIONS
EPITAXY
ESTERS
EXCIMER LASERS
EXCITED STATES
FLUIDS
FLUORESCENCE
FLUORESCENCE SPECTROSCOPY
GAS LASERS
GASES
HELIUM
HIGH-FREQUENCY DISCHARGES
HYDROGEN
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
LASERS
LUMINESCENCE
NONMETALS
ORGANIC COMPOUNDS
ORGANIC PHOSPHORUS COMPOUNDS
PHOSPHIDES
PHOSPHINIC ACID ESTERS
PHOSPHORUS
PHOSPHORUS COMPOUNDS
PNICTIDES
RARE GASES
SPECTRA
SPECTROSCOPY
SURFACE COATING
VAPOR PHASE EPITAXY