Influence of excitation parameters and active medium on the efficiency of an electric-discharge excimer ArF laser

Journal Article · Fri Sep 30 04:00:00 EDT 2005 · Quantum Electronics (Woodbury, N.Y.)

DOI:https://doi.org/10.1070/QE2005V035N09ABEH010349· OSTI ID:21456810

Razhev, A M; Zhupikov, A A ^[1]; Shchedrin, A I; Kalyuzhnaya, Anna G ^[2]

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1. Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk (Russian Federation)
2. Institute of Physics, National Academy of Sciences of Ukraine, Kiev (Ukraine)

The kinetic model of processes occurring in the plasma of an electric-discharge 193-nm excimer ArF laser operating on mixtures of He and Ne buffer gases is developed. The influence of excitation and active medium parameters on the lasing energy and total efficiency of the electric-discharge excimer ArF laser is studied theoretically and experimentally. It is shown that a specific pump power of {approx}4.5-5.0 MW cm{sup -3} is required for attaining the maximum lasing energy for the highest efficiency of an ArF laser operating on a He-Ar-F{sub 2} mixture. For the first time, the pulse energy of 1.3 J at an efficiency of 2.0% is attained for an ArF laser with a specific pump power of 5.0 MW cm{sup -3} using mixtures with helium as a buffer gas. (lasers)

• OSTI ID: 21456810
• Journal Information: Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 9 Vol. 35; ISSN 1063-7818
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON COMPOUNDS
ARGON FLUORIDES
DISPERSIONS
EFFICIENCY
ELECTRIC DISCHARGES
ELEMENTS
ENERGY-LEVEL TRANSITIONS
EXCITATION
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
HELIUM
LASERS
MIXTURES
NONMETALS
PLASMA
PULSES
PUMPING
RARE GAS COMPOUNDS
RARE GASES