Theoretical evaluation of the buffer gas effects for a self-sustained discharge ArF laser

Journal Article · Tue Mar 01 04:00:00 EST 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.339956· OSTI ID:5476137

Ohwa, M; Obara, M

The effect of buffer gases on the operating performance of a self-sustained discharge ArF laser employing a charge transfer excitation circuit has been analyzed theoretically. By the analysis of the electron kinetics, the ArF* formation, the ArF* relaxation, and the absorption of the B..-->..X laser radiation, the pump rate dependence of intrinsic efficiency, small-signal gain, and absorption could be clarified for the Ne- and He-diluted mixtures. It is found that there is no appreciable difference in the intrinsic efficiency of the ArF laser between Ne- and He-diluted mixtures when employing a laser resonator with a strong output coupling. After optimizing output coupling in each case, a higher efficiency is obtainable for the Ne diluent than for the He diluent. For a 4-atm mixture of 4.9% Ar and 0.1% F/sub 2/ in Ne, an intrinsic efficiency of 4% is obtainable, while less than 2% is obtainable for the He-diluted mixtures. However, a higher specific output energy is achievable for the He-diluted mixtures than the Ne-diluted mixtures because the use of He-diluted mixtures can efficiently transfer the stored energy to the laser discharge load.

• Research Organization: Department of Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223, Japan
• OSTI ID: 5476137
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 63:5; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ARGON COMPOUNDS
ARGON FLUORIDES
DATA
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRICAL PUMPING
EXCIMER LASERS
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
LASERS
NUMERICAL DATA
OPERATION
PERFORMANCE
PUMPING
RARE GAS COMPOUNDS