Integrated interfacing circuit for capacitive sensors

Thesis/Dissertation · Thu Jan 01 00:00:00 EST 1987

OSTI ID:6973295

Yeh, G J

A CMOS integrated interfacing circuit for use in capacitive sensors was fabricated and tested. The unique features of this circuit are: (1) the sensitivity and null point of the output voltage can be programmed independently by two controlled voltage sources; (2) the insensitivity of the circuit to large fixed stray capacitance, making it useful in silicon-to-silicon capacitive transducers and the two-chips module approach of sensor packaging; and (3) a high output level, with a sensitivity of 4.6 V/pF is obtained from a dual in-line package. The principle, operation, and applications of this circuit are presented in this thesis. The applications such as pressure transducer, accelerometer, angle sensors, and flowmeter are given.

• Research Organization: Case Western Reserve Univ., Cleveland, OH (USA)
• OSTI ID: 6973295
• Resource Relation: Other Information: Thesis (Ph. D.)
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
ELECTRONIC CIRCUITS
INTEGRATED CIRCUITS
FABRICATION
TRANSDUCERS
MOS TRANSISTORS
SENSITIVITY
TESTING
MICROELECTRONIC CIRCUITS
SEMICONDUCTOR DEVICES
TRANSISTORS
420800* - Engineering- Electronic Circuits & Devices- (-1989)
990210 - Supercomputers- (1987-1989)