Integrated interfacing circuit for capacitive sensors
A CMOS integrated interfacing circuit for use in capacitive sensors was fabricated and tested. The unique features of this circuit are: (1) the sensitivity and null point of the output voltage can be programmed independently by two controlled voltage sources; (2) the insensitivity of the circuit to large fixed stray capacitance, making it useful in silicon-to-silicon capacitive transducers and the two-chips module approach of sensor packaging; and (3) a high output level, with a sensitivity of 4.6 V/pF is obtained from a dual in-line package. The principle, operation, and applications of this circuit are presented in this thesis. The applications such as pressure transducer, accelerometer, angle sensors, and flowmeter are given.
- Research Organization:
- Case Western Reserve Univ., Cleveland, OH (USA)
- OSTI ID:
- 6973295
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
99 GENERAL AND MISCELLANEOUS
990210 -- Supercomputers-- (1987-1989)
ELECTRONIC CIRCUITS
FABRICATION
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
MOS TRANSISTORS
SEMICONDUCTOR DEVICES
SENSITIVITY
TESTING
TRANSDUCERS
TRANSISTORS