Measurement of rotational temperature and dissociation in N/sub 2/O glow discharges using in situ Fourier transform infrared spectroscopy

Journal Article · Mon Aug 01 00:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341891· OSTI ID:6964524

Cleland, T A; Hess, D W

The technique of in situ Fourier transform infrared (FTIR) absorption spectroscopy has been used to determine rotational temperatures and the extent of dissociation of N/sub 2/ O in a radio-frequency (rf) glow discharge. Measurements were made at 0.65 cm/sup -1/ resolution on 13.56-MHz plasmas at 500 mTorr, with an input flowrate of 40 sccm, and powers of 10 and 30 W. Temperature and dissociation information estimates are based upon analysis of P branch rotational lines of the 2..nu../sub 1/ harmonic and ..nu../sub 1/ +..nu../sub 3/ combination band of the molecule. Line intensities are corrected for instrument-induced distortion. Under the conditions investigated, rotational temperatures are between 335 and 420 K, and dissociation ranges from 45% to 75%. Both rotational temperature and dissociation increase with rf power.

• Research Organization: Department of Chemical Engineering, University of California at Berkeley, Berkeley, California 94720
• OSTI ID: 6964524
• Journal Information: J. Appl. Phys.; (United States), Vol. 64:3
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
GLOW DISCHARGES
ABSORPTION SPECTROSCOPY
HIGH TEMPERATURE
MEDIUM TEMPERATURE
MHZ RANGE 01-100
NITROUS OXIDE
PLASMA
PLASMA DIAGNOSTICS
TEMPERATURE MEASUREMENT
CHALCOGENIDES
ELECTRIC DISCHARGES
FREQUENCY RANGE
MHZ RANGE
NITROGEN COMPOUNDS
NITROGEN OXIDES
OXIDES
OXYGEN COMPOUNDS
SPECTROSCOPY
700102* - Fusion Energy- Plasma Research- Diagnostics