Multiple-frequency surface acoustic wave devices as sensors
We have designed, fabricated, and tested a multiple-frequency acoustic wave (MUFAW) device on ST-cut quartz with nominal SAW (surface acoustic wave) center frequencies of 16, 40, 100, and 250 MHz. The four frequencies are obtained by patterning four sets of input and output interdigital transducers of differing periodicities on a single substrate. Such a device allows the frequency dependence of AW sensor perturbations to be examined, aiding in the elucidation of the operative interaction mechanism(s). Initial measurements of the SAW response to the vacuum deposition of a thin nickel film show the expected frequency dependence of mass sensitivity in addition to the expected frequency independence of the magnitude of the acoustoelectric effect. By measuring changes in both wave velocity and attenuation at multiple frequencies, extrinsic perturbations such as temperature and pressure changes are readily differentiated from one another and from changes in surface mass. 10 refs., 6 figs., 1 tab.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6959333
- Report Number(s):
- SAND-90-0139C; CONF-9006172-1; ON: DE90009972
- Resource Relation:
- Conference: Solid state and sensor actuator workshop, Hilton Head Island, SC (USA), 4-7 Jun 1990
- Country of Publication:
- United States
- Language:
- English
Similar Records
Multiple-frequency acoustic wave devices for chemical sensing and materials characterization in both gas and liquid phase
Multiple-frequency acoustic wave devices for chemical sensing and materials characterization in both gas and liquid phase
Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
ACOUSTIC DETECTION
WAVE PROPAGATION
THIN FILMS
MEASURING METHODS
TRANSDUCERS
ACOUSTIC MONITORING
ATTENUATION
FREQUENCY ANALYSIS
INTERACTIONS
INTERFACES
MECHANICAL PROPERTIES
NICKEL
PERTURBATION THEORY
PHYSICAL PROPERTIES
PIEZOELECTRICITY
QUARTZ
SENSITIVITY
SUBSTRATES
SURFACE PROPERTIES
WAVELENGTHS
ACOUSTIC MEASUREMENTS
CHALCOGENIDES
CHARGED PARTICLE DETECTION
DETECTION
ELECTRICITY
ELEMENTS
FILMS
METALS
MINERALS
MONITORING
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
RADIATION DETECTION
SILICON COMPOUNDS
SILICON OXIDES
TRANSITION ELEMENTS
440800* - Miscellaneous Instrumentation- (1990-)
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
360603 - Materials- Properties