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Multiple-frequency acoustic wave devices for chemical sensing and materials characterization in both gas and liquid phase

Patent ·
OSTI ID:868887
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations
A chemical sensor (1) includes two or more pairs of interdigital electrodes (10) having different periodicities. Each pair is comprised of a first electrode (10a) and a second electrode (10b). The electrodes are patterned on a surface of a piezoelectric substrate (12). Each pair of electrodes may launch and receive various acoustic waves (AW), including a surface acoustic wave (SAW), and may also launch and receive several acoustic plate modes (APMs). The frequencies associated with each are functions of the transducer periodicity as well as the velocity of the particular AW in the chosen substrate material. An AW interaction region (13) exists between each pair of electrodes. Circuitry (20, 40) is used to launch, receive, and monitor the propagation characteristics of the AWs and may be configured in an intermittent measurement fashion or in a continuous measurement fashion. Perturbations to the AW velocity and attenuation are recorded at several frequencies and provide the sensor response.
Research Organization:
AT & T CORP
DOE Contract Number:
AC04-76DP00789
Assignee:
United States of America as Represented by United States (Washington, DC)
Patent Number(s):
US 5235235
OSTI ID:
868887
Country of Publication:
United States
Language:
English

References (4)

Mechanism of operation and design considerations for surface acoustic wave device vapour sensors journal July 1984
Characterization of SH acoustic plate mode liquid sensors journal December 1989
Monitoring Thin-Film Properties with Surface Acoustic Wave Devices book August 1989
Surface acoustic wave gas sensor based on film conductivity changes journal December 1985

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