Multiple-frequency surface acoustic wave devices as sensors
We have designed, fabricated, and tested a multiple-frequency acoustic wave (MUFAW) device on ST-cut quartz with nominal SAW (surface acoustic wave) center frequencies of 16, 40, 100, and 250 MHz. The four frequencies are obtained by patterning four sets of input and output interdigital transducers of differing periodicities on a single substrate. Such a device allows the frequency dependence of AW sensor perturbations to be examined, aiding in the elucidation of the operative interaction mechanism(s). Initial measurements of the SAW response to the vacuum deposition of a thin nickel film show the expected frequency dependence of mass sensitivity in addition to the expected frequency independence of the magnitude of the acoustoelectric effect. By measuring changes in both wave velocity and attenuation at multiple frequencies, extrinsic perturbations such as temperature and pressure changes are readily differentiated from one another and from changes in surface mass. 10 refs., 6 figs., 1 tab.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6959333
- Report Number(s):
- SAND-90-0139C; CONF-9006172--1; ON: DE90009972
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360603 -- Materials-- Properties
440800* -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACOUSTIC DETECTION
ACOUSTIC MEASUREMENTS
ACOUSTIC MONITORING
ATTENUATION
CHALCOGENIDES
CHARGED PARTICLE DETECTION
DETECTION
ELECTRICITY
ELEMENTS
FILMS
FREQUENCY ANALYSIS
INTERACTIONS
INTERFACES
MEASURING METHODS
MECHANICAL PROPERTIES
METALS
MINERALS
MONITORING
NICKEL
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PERTURBATION THEORY
PHYSICAL PROPERTIES
PIEZOELECTRICITY
QUARTZ
RADIATION DETECTION
SENSITIVITY
SILICON COMPOUNDS
SILICON OXIDES
SUBSTRATES
SURFACE PROPERTIES
THIN FILMS
TRANSDUCERS
TRANSITION ELEMENTS
WAVE PROPAGATION
WAVELENGTHS