High T/sub c/ YBa/sub 2/Cu/sub 3/O/sub 7-x/ superconducting thin films by rf magnetron sputtering

Conference · Thu Feb 25 04:00:00 EST 1988 · AIP Conf. Proc.; (United States)

OSTI ID:6957567

Lee, W Y; Salem, J; Lee, V; Rettner, C T; Lim, G; Savoy, R; Deline, V

Thin films of YBa/sub 2/Cu/sub 3/O/sub 7-x/ were deposited by RF magnetron sputtering onto BaTiO/sub 3/, Al/sub 2/O/sub 3/, MgO, and SrTiO/sub 3/ substrates at ambient temperature to 500/sup 0/C from a sintered powder target having the same nominal composition. Four point AC resistivity measurements indicate that these films (approx.2..mu..m thick) are superconducting after annealing in flowing oxygen at approx.900/sup 0/C for several minutes. While the onset T/sub c/ remains fairly constant at approx.88--91 K, the ending T/sub c/ depends strongly on the deposition and annealing conditions, and substrates used. The films deposited at 300/sup 0/C and annealed at 900/sup 0/C for 1min., for example, have an ending T/sub c/ of 45--53, 70--83, and 80--86.5 K when deposited, respectively, on Al/sub 2/O/sub 3/, BaTiO/sub 3/ and MgO, and SrTiO/sub 3/. Electron microprobe analyses show that these films have a spatially homogeneous composition of typically approx.YBa/sub 2/Cu/sub 3/O/sub 8/. X-ray diffraction data also reveal that the annealed films have the characteristics orthorhombic structure with lattice constants practically identical to those of the bulk YBa/sub 2/Cu/sub 3/O/sub 7-x/, although minor phases (e.g., BaCuO/sub 2/) with concentration of up to 15% can also be detected. These effects of ion bombardment during deposition and of interdiffusion of film and substrate during annealing are also presented, with emphasis on the film composition and T/sub c/, and stability in room ambient.

• Research Organization: IBM Almaden Research Center, San Jose, Ca. 95120
• OSTI ID: 6957567
• Report Number(s): CONF-871178-
• Conference Information: Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 165:1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COMPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DIFFRACTION
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON PROBES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
HEAT TREATMENTS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
PROBES
RADIATION EFFECTS
SCATTERING
SINTERING
SORPTIVE PROPERTIES
SPUTTERING
STABILITY
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SURFACE PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS