Ti-implanted optical waveguides in LiNbO/sub 3/
LiNbO/sub 3/ is the best substrate for modulators and switches for integrated optics. Efficient low loss waveguides are fabricated by introducing Ti into the crystal. The maximum Ti concentration and the corresponding ..delta..n as well as the minimum waveguide dimensions normally are limited by the diffusion characteristics. Ion implantation offers an interesting alternative, especially if infrared applications are intended. During the implantation process an amorphous non-equilibrium phase is generated, and subsequently the crystalline state has to be restored by solid phase epitaxy. This process results in guides with low losses of < 1 db/cm. Fabrication details and guide characteristics are presented. 14 refs., 4 figs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6957200
- Report Number(s):
- CONF-8805147-2; ON: DE88015279
- Resource Relation:
- Conference: European Materials Research Society meeting, Strasbourg, France, 31 May 1988; Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
LITHIUM OXIDES
ION IMPLANTATION
NIOBIUM OXIDES
ANNEALING
CRYSTAL DOPING
OPTICAL PROPERTIES
RECRYSTALLIZATION
TITANIUM
WAVEGUIDES
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELEMENTS
HEAT TREATMENTS
LITHIUM COMPOUNDS
METALS
NIOBIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTORY METAL COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
360206* - Ceramics
Cermets
& Refractories- Radiation Effects
360204 - Ceramics
Cermets
& Refractories- Physical Properties