Characterization of amorphous hydrogenated carbon using solid-state nuclear magnetic resonance spectroscopy

Journal Article · · Chemistry of Materials; (USA)

DOI:https://doi.org/10.1021/cm00008a025· OSTI ID:6946523

Bustillo, K C ^[1]; Petrich, M A; Reimer, J A ^[1]

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1. Univ. of California, Berkeley (USA)

Amorphous hydrogenated carbon films deposited from a radio frequency (rf) plasma discharge were characterized with respect to their local bonding configurations and resulting electrooptical properties. Films deposited at substrate temperatures of 66-256{degree}C were examined with interferometry, ellipsometry, infrared spectroscopy, spectrophotometry, and electron spin resonance. The carbon bonding configurations and hydrogen content were subsequently measured with solid-state nuclear magnetic resonance (NMR).

• OSTI ID: 6946523
• Journal Information: Chemistry of Materials; (USA), Vol. 2:2; ISSN 0897-4756
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
ELLIPSOMETRY
INFRARED SPECTRA
NMR SPECTRA
AMORPHOUS STATE
DATA ANALYSIS
EXPERIMENTAL DATA
FILMS
MEASURING INSTRUMENTS
MEASURING METHODS
DATA
ELEMENTS
INFORMATION
NONMETALS
NUMERICAL DATA
SPECTRA
360603* - Materials- Properties
360602 - Other Materials- Structure & Phase Studies