Porous silicon oxynitrides formed by ammonia heat treatment

Journal Article · Sun Apr 15 00:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.346077· OSTI ID:6944697

Tsao, S S; Guilinger, T R; Kelly, M J; Stein, H J; Barbour, J C; Knapp, J A ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (USA)

Porous silicon and its oxide can be converted into porous silicon oxynitrides by ammonia heat treatment. For example, ammonia treatment at 1000 {degree}C for 1 h following 850 {degree}C, 30-min steam oxidation of porous silicon can result in up to 40 at. % nitrogen in the porous oxynitrides. These porous silicon oxynitrides are compositionally more uniform than ammonia-nitrided thermal oxides which exhibit nitrogen buildup at the oxide layer interfaces. However, the order of the oxidation and nitridation treatment matters: nitrided oxidized porous silicon exhibits higher electrical breakdown strength than nitrided porous silicon or oxidized nitrided porous silicon.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6944697
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 67:8; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400800* -- Combustion
Pyrolysis
& High-Temperature Chemistry
AMMONIA
BREAKDOWN
CHALCOGENIDES
CHEMICAL REACTIONS
ELEMENTS
HEAT TREATMENTS
HYDRIDES
HYDROGEN COMPOUNDS
MATERIALS
NITRIDATION
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
POROUS MATERIALS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SYNTHESIS