Photoresist laminate
Patent
·
OSTI ID:6927366
The disclosure relates to a laminated negative dry-film photoresist for the production of thick, as well as thin, patterns with vertical sidewalls. Uniform depthwise exposure in a photoresist layer is effected by the use of an ultraviolet filtering top layer.
- DOE Contract Number:
- AT(29-1)-789
- Assignee:
- Dept. of Energy
- Patent Number(s):
- None
- OSTI ID:
- 6927366
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
DESIGN
ECONOMICS
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
EQUIPMENT
ESTERS
FABRICATION
FILMS
IMAGES
MATERIALS TESTING
MYLAR
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHOTORESISTORS
PLASTICS
POLYESTERS
POLYETHYLENES
POLYMERS
POLYOLEFINS
PRINTED CIRCUITS
RADIATIONS
RESISTORS
TESTING
ULTRAVIOLET RADIATION
VISIBLE RADIATION
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
DESIGN
ECONOMICS
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
EQUIPMENT
ESTERS
FABRICATION
FILMS
IMAGES
MATERIALS TESTING
MYLAR
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHOTORESISTORS
PLASTICS
POLYESTERS
POLYETHYLENES
POLYMERS
POLYOLEFINS
PRINTED CIRCUITS
RADIATIONS
RESISTORS
TESTING
ULTRAVIOLET RADIATION
VISIBLE RADIATION