Poly(methyl methacrylate) degradation during x-ray photoelectron spectroscopy analysis

Journal Article · Wed Feb 28 23:00:00 EST 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576917· OSTI ID:6910106

Buchwalter, L P; Czornyj, G ^[1]

---

1. IBM East Fishkill, Hopewell Junction, New York 12533 (US)

Poly(methyl methacrylate) (PMMA) was chosen as a model lithographic material to study the effect of A1 {ital K}{sub {alpha}} radiation and the thermal (flood gun) electron flux on polymer surface. The main chemical changes, which can occur in polymers by radiation, are (1) main-chain scission, (2) cross linking, and (3) volatile product formation and cyclization. The data shows that, although the flood gun electrons do not affect the PMMA surface, the x-ray radiation causes degradation in molecular weight by main-chain scission.

• OSTI ID: 6910106
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:2; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360604* -- Materials-- Corrosion
Erosion
& Degradation
CHEMICAL ANALYSIS
DATA ANALYSIS
ELECTROMAGNETIC RADIATION
IN-SITU PROCESSING
IONIZATION
IONIZING RADIATIONS
IRRADIATION
NONDESTRUCTIVE ANALYSIS
PHOTOIONIZATION
POLYMERS
PROCESSING
RADIATIONS
SAMPLE PREPARATION
X RADIATION
X-RAY EMISSION ANALYSIS