Study of. gamma. -irradiated lithographic polymers by electron spin resonance and electron nuclear double resonance. [Poly(methyl-. cap alpha. -chloroacrylate) (PMCA), poly(methy)-. cap alpha. -fluoroacrylate) (PMFA), poly(methylacrylonitrile) (PMCN)]

Journal Article · Fri Jan 01 04:00:00 EST 1982 · J. Appl. Polym. Sci.; (United States)

DOI:https://doi.org/10.1002/app.1982.070270132· OSTI ID:5659852

Schlick, S ^[1]; Kevan, L

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1. Wayne State Univ., Detroit, MI

The room temperature gamma irradiation degradation of the lithographic polymers, poly(methylmethacrylate) (PMMA), poly(methyl-..cap alpha..-chloroacrylate) (PMCA), poly(methyl-..cap alpha..-fluoroacrylate) (PMFA), and poly(methylacrylonitrile) (PMCN), have been studied by electron spin resonance and electron nuclear double resonance (ENDOR) to assess their molecular degradation processes of relevance to electron beam lithography. Two classes of radicals are found, chain radicals and chain scission radicals. PMMA and PMCA mainly form chain scission radicals consistent with degradation while for PMCN the resolution is poorer, and this is only probable. PMFA forms mainly chain radicals consistent with predominant crosslinking. The total radical yield is greatest in PMCA and PMCN. ENDOR is used to assess the compactness of the radiation degradation region for PMMA and PMCA and hence the potential resolution of the resist; this appears to be about the same for these methacrylate polymers.

• OSTI ID: 5659852
• Journal Information: J. Appl. Polym. Sci.; (United States), Journal Name: J. Appl. Polym. Sci.; (United States) Vol. 27:1; ISSN JAPNA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
CHEMICAL RADIATION EFFECTS
CHEMISTRY
ELECTROMAGNETIC RADIATION
ELECTRON SPIN RESONANCE
ENDOR
ESTERS
GAMMA RADIATION
IONIZING RADIATIONS
MAGNETIC RESONANCE
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PMMA
POLYACRYLATES
POLYMERS
POLYVINYLS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIATIONS
RADICALS
RESONANCE