Hot hollow cathode gun assembly

Patent · Tue Nov 22 00:00:00 EST 1983

OSTI ID:6900101

Zeren, J D

A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.

• DOE Contract Number: AC04-76DP03533
• Assignee: Dept. of Energy
• Application Number: ON: DE84014312
• OSTI ID: 6900101
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
HOLLOW CATHODES
DESIGN
CYLINDRICAL CONFIGURATION
HEAT SINKS
MAGNETIC FIELDS
MECHANICAL STRUCTURES
PLASMA
CATHODES
CONFIGURATION
ELECTRODES
SINKS
420200* - Engineering- Facilities
Equipment
& Techniques