Vacuum vapor deposition gun assembly
Patent
·
OSTI ID:865720
- Boulder, CO
A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.
- Research Organization:
- ROCKWELL INTERNATIONAL CORP
- DOE Contract Number:
- AC04-76DP03533
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4561382
- OSTI ID:
- 865720
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/118/219/
adjustable
assembly
cathode
cathode gun
covering
crucible
cylindrical
cylindrical outer
deposition
deposition gun
gun
gun assembly
heat
heat sink
holding
hollow
hollow cathode
hot
hot hollow
magnets
outer
outer surface
plasma
plate
selectively
shutter
sink
steering
surface
uncovering
vacuum
vacuum vapor
vapor
vapor deposition
adjustable
assembly
cathode
cathode gun
covering
crucible
cylindrical
cylindrical outer
deposition
deposition gun
gun
gun assembly
heat
heat sink
holding
hollow
hollow cathode
hot
hot hollow
magnets
outer
outer surface
plasma
plate
selectively
shutter
sink
steering
surface
uncovering
vacuum
vacuum vapor
vapor
vapor deposition