Thin film characterization using analytical electron microscopy

Journal Article · Tue Jan 01 04:00:00 EST 1980 · Thin Solid Films; (United States)

DOI:https://doi.org/10.1016/0040-6090(80)90572-6· OSTI ID:6870947

Zaluzec, N J

In order to understand the properties of solids, the materials scientist frequently needs to characterize the microstructure of a material on as fine a scale as possible. Characterization here is used in its most general sense, i.e. to describe as completely as possible the morphology, crystallography and elemental composition of the material under investigation. Although instruments have been developed over the years that can provide this information, they generally have one common limitation, namely spatial resolution. Analytical electron microscopy (AEM) is the term which is now applied to a new group of analytical techniques used in conjunction with a transmission electron microscope and/or a scaning-transmission electron microscope that can provide high spatial resolution (about 20 nm) analyses from microvolumes of material in thin electron-transparent specimens. The basic principles of microanalysis using AEM are discussed, together with examples of application in both metallurgical and ceramic studies.

• Research Organization: Argonne National Lab., IL
• OSTI ID: 6870947
• Journal Information: Thin Solid Films; (United States), Journal Name: Thin Solid Films; (United States) Vol. 72; ISSN THSFA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400100* -- Analytical & Separations Chemistry
CRYSTAL DEFECTS
CRYSTAL FACES
CRYSTAL STRUCTURE
DATA
DATA COMPILATION
ELECTRON MICROSCOPY
INFORMATION
MICROANALYSIS
MICROSCOPY
NUMERICAL DATA
SOLIDS