A zone plate soft x-ray microscope using monochromatized undulator radiation at the beamline NE1B of the TRISTAN Accumulation Ring

Journal Article · Tue Jan 31 23:00:00 EST 1995 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1145987· OSTI ID:6865368

Wang, J ^[1]; Kagoshima, Y; Miyahara, T; Ando, M ^[2]; Aoki, S ^[3]; Anderson, E; Attwood, D ^[4]; Kern, D ^[5]

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1. Department of Synchrotron Radiation Science, The Graduate University for Advanced Studies, Tsukuba, Ibaraki 305 (Japan)
2. Department of Synchrotron Radiation Science, The Graduate University for Advanced Studies, Tsukuba, Ibaraki 305 (Japan) Photon Factory, National Laboratory for High Energy Physics, Tsukuba, Ibaraki 305 (Japan)
3. Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305 (Japan)
4. Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, California 94720 (United States)
5. Institut fuer Angewandte Physik, Universitaet Tuebingen, Auf der Morgenstelle 12, Tuebingen 1 (Germany)

A soft x-ray microscope has been developed at the beamline NE1B of the 6.5-GeV TRISTAN Accumulation Ring (AR). It makes use of undulator radiation as its source and a zone plate with the outermost zone width of 50 nm as its imaging element. It has two main features. First, the undulator radiation is monochromatized by a grazing incidence grating monochromator to match to the monochromaticity requirement of the zone plate. Second, a visible light prefocus unit consisting of two objectives has been designed and installed in the x-ray microscope. The x-ray optical system of the microscope can be adjusted easily, quickly, and precisely by using this unit. The microscope can resolve 55-nm lines and spaces in a zone plate test pattern.

• OSTI ID: 6865368
• Journal Information: Review of Scientific Instruments; (United States), Journal Name: Review of Scientific Instruments; (United States) Vol. 66:2; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430303* -- Particle Accelerators-- Experimental Facilities & Equipment
BREMSSTRAHLUNG
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
MICROSCOPES
MONOCHROMATIC RADIATION
ONDULATOR RADIATION
RADIATION SOURCES
RADIATIONS
RESOLUTION
SOFT X RADIATION
SPATIAL RESOLUTION
STORAGE RINGS
SYNCHROTRON RADIATION SOURCES
TRISTAN STORAGE RINGS
USES
X RADIATION