National Bureau of Standards primary high-vacuum standard
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
The theory, design, operating procedures, and estimated errors are discussed for an orifice-flow-type pressure standard currently in use at the National Bureau of Standards. This standard is used to define pressures between 10/sup -7/ and 10/sup -1/ Pa. Including the uncertainty of the flowmeter, the estimated total uncertainty varies from 2.6% at the highest pressures, to 1.4% at midrange, and 8.2% at the lowest pressures. Representative calibration results are presented for four different types of hot-cathode ionization gauges.
- Research Organization:
- National Bureau of Standards, Center for Basic Standards, Gaithersburg, Maryland 20899
- OSTI ID:
- 6861674
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:5; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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