An automated vacuum gauge calibration system
- NIST, GAithersburg, MD (United States)
- Sandia National Labs., Albuquerque, NM (United States)
An automated system for calibrating vacuum gauges over the pressure range of 10{sup {minus}6} to 0.1 Pa was designed and constructed at the National Institute of Standards and Technology (NIST) for the Department of Energy (DOE) Primary Standards Laboratory at Sandia National Laboratories (SNL). Calculable pressures are generated by passing a known flow of gas through an orifice of known conductance. The orifice conductance is derived from dimensional measurements and accurate flows are generated using metal capillary leaks. The expanded uncertainty (k = 2) in the generated pressure is estimated to be between 1% and 4% over the calibration range. The design, calibration results. and component uncertainties will be discussed.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 654189
- Report Number(s):
- SAND-98-0979C; CONF-980721-; ON: DE98004952; BR: DP0401012; TRN: AHC2DT05%%279
- Resource Relation:
- Conference: National conference of standards laboratories (NCSL) 1998 workshop and symposium, Albuquerque, NM (United States), 19-23 Jul 1998; Other Information: PBD: Apr 1998
- Country of Publication:
- United States
- Language:
- English
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