Phase transition in B1-type Mo sub 1 minus x Nb sub x N sputtered films under ammonia annealing

Journal Article · Fri Sep 01 04:00:00 EDT 1989 · Journal of Solid State Chemistry; (USA)

DOI:https://doi.org/10.1016/0022-4596(89)90214-4· OSTI ID:6838693

Lai, Gao-Chao; Takahashi, Masao; Nobugai, Kohji; Kanamaru, Fumikazu ^[1]

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1. Osaka Univ., Ibaraki (Japan)

B1-type solid solution Mo{sub 1{minus}x}Nb{sub x}N sputtered films were annealed at 500-900{degree}C for 5-100 hr under flowing ammonia, in order to investigate the stability of B1 structure and phase transition in the solid solution as a function of annealing temperature and chemical composition x. The B1 phase of the MoN films (x = 0) transferred to a hexagonal phase above 600{degree}C. In the Mo-rich solid solution films with x {approx lt} 0.23, the B1 phase was converted to the {gamma}-Mo{sub 2}N-type phase between 600{degree}C and 800{degree}C, and the transition temperature increased with increases in x. A hexagonal solid solution with WC-structure was formed in the films with x {approx lt} 0.38 at 900{degree}C. No phase transition occurred until 900{degree}C in the Nb-rich solid solution films with x {approx gt} 0.59. The result indicates that the stability of B1 structure in the solid solution was increased by the addition of NbN.

• OSTI ID: 6838693
• Journal Information: Journal of Solid State Chemistry; (USA), Journal Name: Journal of Solid State Chemistry; (USA) Vol. 82:1; ISSN JSSCB; ISSN 0022-4596
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360000* -- Materials
360100 -- Metals & Alloys
360104 -- Metals & Alloys-- Physical Properties
AMMONIA
CALCULATION METHODS
DATA
DATA ANALYSIS
DISPERSIONS
EXPERIMENTAL DATA
HIGH TEMPERATURE
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
MEASURING INSTRUMENTS
MEASURING METHODS
MIXTURES
MOLYBDENUM COMPOUNDS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NUMERICAL DATA
PHASE STABILITY
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SOLID SOLUTIONS
SOLUTIONS
SPUTTERING
STABILITY
TRANSITION ELEMENT COMPOUNDS