High temperature Raman studies of phase transitions in thin film dielectrics

Journal Article · Tue Jan 01 04:00:00 EST 1985 · Mater. Res. Soc. Symp. Proc.; (United States)

DOI:https://doi.org/10.1557/PROC-48-461· OSTI ID:6837088

Exarhos, G J

Rapid and unambiguous characterization of crystalline phases in submicron sputter deposited TiO/sub 2/ films on silica substrates can be inferred from measured Raman spectra. Pure anatase and rutile, mixed phase, and amorphous films to thicknesses of several hundred Angstroms and greater yield Raman spectra exhibiting little interference from the substrate when the appropriate component of the scattered light is analyzed. In situ Raman spectra were acquired as a function of temperature to 900/sup 0/C using conventional radiant heating techniques and to temperatures near 2000/sup 0/C using 10.6/sup +/ radiation from a CW CO/sub 2/ laser as a localized heating source. Pulsed Raman excitation/gated detection techniques were used to minimize blackbody radiation interference at these high temperatures. Anatase and amorphous TiO/sub 2/ films transform irreversibly to the rutile phase at temperatures below 900/sup 0/C while rutile appears to be sable at much higher temperatures. Measurements performed on uncoated silica substrates at temperatures where the glass becomes fluid suggest that the strongly crosslinked glass has partially transformed into a chain-like structure. 12 references, 8 figures.

• Research Organization: Pacific Northwest Lab., Richland, WA
• DOE Contract Number: AC06-76RL01830
• OSTI ID: 6837088
• Journal Information: Mater. Res. Soc. Symp. Proc.; (United States), Journal Name: Mater. Res. Soc. Symp. Proc.; (United States) Vol. 48; ISSN MRSPD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
CHALCOGENIDES
CRYSTAL STRUCTURE
DATA
DIMENSIONS
EXPERIMENTAL DATA
FILMS
INFORMATION
LASER SPECTROSCOPY
MATERIALS
MINERALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
RADIOACTIVE MATERIALS
RADIOACTIVE MINERALS
RAMAN SPECTRA
RUTILE
SILICA
SILICON COMPOUNDS
SILICON OXIDES
SPECTRA
SPECTROSCOPY
SPUTTERING
TEMPERATURE DEPENDENCE
THICKNESS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS