New thin-film sensor detects nitrogen dioxide

Journal Article · Mon Oct 03 00:00:00 EDT 1994 · Chemical and Engineering News; (United States)

OSTI ID:6829686

Freemantle, M

Researchers in Wales have developed an inexpensive nitrogen dioxide gas sensor that they hope will eventually be produced commercially for use in a variety of environmental applications. The device is based on tin dioxide and combines the benefits of semiconductor technology and thin-film production routes. Thin films are prepared by a novel, two-step sputtering-oxidation route. A film of metallic tin is deposited on a platinum contact array on an lumina substrate by radio frequency sputtering from a tin target heated in an atmosphere of argon. The tin is then oxidized by heating the device in an oxygen stream.

• OSTI ID: 6829686
• Journal Information: Chemical and Engineering News; (United States), Journal Name: Chemical and Engineering News; (United States) Vol. 72:40; ISSN 0009-2347; ISSN CENEAR
• Country of Publication: United States
• Language: English

Related Subjects

54 ENVIRONMENTAL SCIENCES
540120* -- Environment
Atmospheric-- Chemicals Monitoring & Transport-- (1990-)
AIR POLLUTION MONITORING
AIR POLLUTION MONITORS
CHALCOGENIDES
DESIGN
MEASURING INSTRUMENTS
MONITORING
MONITORS
NITROGEN COMPOUNDS
NITROGEN DIOXIDE
NITROGEN OXIDES
OXIDES
OXYGEN COMPOUNDS
TECHNOLOGY ASSESSMENT