H atom reactions with GaAs l angle 001 r angle

Journal Article · Tue May 01 04:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.344906· OSTI ID:6826516

Chuang, M; Coburn, J W ^[1]

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1. IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099 (USA)

A GaAs {l angle}001{r angle} crystal at room temperature has been exposed to a flux of hydrogen atoms with and without simultaneous 2-keV argon ion bombardment. A modulated molecular beam mass spectrometric detection system is used to monitor the volatile products evolved from the surface, and {ital in} {ital situ} Auger electron spectroscopy is used to monitor the surface conditions. With the H atom flux alone no volatile products were observed but an arsenic deficiency was seen with Auger electron spectroscopy. With simultaneous H atom exposure and Ar{sup +} bombardment, arsenic hydrides were observed with the mass spectrometer and a larger arsenic deficiency was observed on the processed surface. No gallium hydrides were observed at any time.

• OSTI ID: 6826516
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 67:9; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

656002* -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
ARSENIC COMPOUNDS
ARSENIC HYDRIDES
ARSENIDES
ATOM COLLISIONS
AUGER ELECTRON SPECTROSCOPY
CHARGED PARTICLES
CHEMICAL REACTIONS
COLLISIONS
CRYSTALS
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY RANGE
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
MASS SPECTROSCOPY
MEDIUM TEMPERATURE
NONMETALS
PNICTIDES
SPECTROSCOPY