Self-consistent stochastic electron heating in radio frequency discharges

Journal Article · Tue Nov 01 04:00:00 EST 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341286· OSTI ID:6822847

Goedde, C G; Lichtenberg, A J; Lieberman, M A

Fermi acceleration is considered as an underlying mechanism for electron heating in rf discharges, in which the heating arises from the reflection of electrons from moving sheaths. By examining the dynamics of the electron collisions with the sheaths, the map that describes the electron motion is derived. For high-frequency discharges (..omega../2..pi..>50 MHz), the electron motion is shown to be stochastic. By combining these dynamics with collisional effects in the bulk plasma and incorporating self-consistent physical constraints, a self-consistent model of the discharge is developed. The model is used to calculate physically interesting quantities, such as the electron temperature and average lifetime, and to predict the minimum pressure necessary to sustain the plasma. The distribution of electron energies is shown to be non-Maxwellian. These results can be applied to experimentally interesting parallel-plate rf plasma discharges to predict the operating conditions necessary for stochastic heating to occur.

• Research Organization: Department of Physics, University of California, Berkeley, California 94720
• OSTI ID: 6822847
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:9; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700101* -- Fusion Energy-- Plasma Research-- Confinement
Heating
& Production
DYNAMICS
ELECTRIC DISCHARGES
ELECTRON TEMPERATURE
HEATING
HIGH-FREQUENCY DISCHARGES
HIGH-FREQUENCY HEATING
MECHANICS
MICROWAVE HEATING
PLASMA HEATING
RF SYSTEMS
STOCHASTIC PROCESSES