Evacuation apparatus with cryogenic pump and trap assembly

Patent · Tue Jul 29 04:00:00 EDT 1980

OSTI ID:6821499

Mahl, G

An evacuation apparatus comprising a vessel defining a vacuum chamber therein, vacuumizing means communicating with an opening to said vacuum chamber for selectively drawing a vacuum therein comprising cryogenic pump means disposed closely adjacent to said opening and defined by substantial cryogenically cooled trap surfaces for freezing-out water vapor from air evacuated from said vacuum chamber, said opening being common to said vacuum chamber and to said cryogenic pump means, valve means for selectively opening or closing the opening to said vacuum chamber and movable from a first position within said cryogenic pump means closing said opening to a second position within said cryogenic pump means directly exposing said vacuum chamber to said cryogenic pump means, through said opening, baffle means disposed closely adjacent to the opening to said vacuum chamber for providing substantial open communication to said vacuum chamber and for substantially preventing ingress of contaminants into said vacuum chamber, said baffle means being positioned to provide an optically dense view of said opening when viewed from a downstream side of said baffle means, and a plurality of longitudinally spaced and cryogenically cooled fins mounted in nested relationship within said baffle means and disposed in out-of-contact relationship therewith, said fins being positioned to provide an optically dense view of the downstream side of said baffle means when viewed from said openings. The cryogenic pump is adapted for use in an evacuation apparatus comprising a housing defining an opening to a vacuum chamber, a plurality of metallic plates defining a first chamber therein communicating with said vacuum chamber through said opening and further defining a second chamber at least partially surrounding said first chamber and adapted to be at least partially filled with a cryogenic liqui.d

• Assignee: Cha Ind
• Patent Number(s): US 4214853
• OSTI ID: 6821499
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420201 -- Engineering-- Cryogenic Equipment & Devices
420700* -- Engineering-- Vacuum Engineering-- (-1987)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BAFFLES
CONTAINERS
CONTROL EQUIPMENT
COOLING
COPPER
CRYOPUMPS
DEPOSITION
DESIGN
DROPLETS
ELEMENTS
EQUIPMENT
FILMS
FINS
FLOW REGULATORS
FLUIDS
FREEZING OUT
GASES
HYDROGEN COMPOUNDS
LABORATORY EQUIPMENT
METALS
NITROGEN
NONMETALS
OILS
OPENINGS
ORGANIC COMPOUNDS
OTHER ORGANIC COMPOUNDS
OXYGEN COMPOUNDS
PARTICLES
PISTONS
PLATES
PUMPS
SEALS
SEPARATION PROCESSES
TRANSITION ELEMENTS
TRAPS
VACUUM PUMPS
VACUUM SYSTEMS
VALVES
VAPORS
WATER