High vacuum pumping system

Patent · Tue Feb 02 04:00:00 EST 1988

OSTI ID:5334579

Waltrich, P F; Herrmann, H O

A high vacuum pumping system for evacuating a vacuum process chambers is described comprising pump means including a diffusion pump for evacuating the chamber, a double-seated poppet valve communicating with the chamber comprising a pair of spaced valve discs movable vertically within the valve between a lower closed position and an upper open position, a dome comprising a confinable volume within the poppet valve above the upper valve disc when in a closed position, refrigerated coils disposed within the dome, a diffusion pump communicating with the chamber through the poppet valve when the lower valve disc thereof is in an open position, means for maintaining equal pressure within the dome and the chamber when the valve discs are in a closed position, means for refrigerating the coils, and other means for moving the valve discs between the open and closed positions.

• Assignee: Pennwalt Corp., Philadelphia, PA
• Patent Number(s): US 4722191
• OSTI ID: 5334579
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
320106* -- Energy Conservation
Consumption
& Utilization-- Building Equipment-- (1987-)
CONTROL
CONTROL EQUIPMENT
COOLING
COOLING SYSTEMS
DESIGN
DIFFUSION
ENERGY SYSTEMS
EQUIPMENT
FLOW REGULATORS
FLUID MECHANICS
HEAT EXCHANGERS
HYDRAULICS
LABORATORY EQUIPMENT
MECHANICS
OPERATION
PRESSURE CONTROL
PUMPING
PUMPS
REFRIGERATION
VACUUM PUMPS
VALVES