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Generalized formula for curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structures

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.331690· OSTI ID:6801609

The generalized formulas have been derived for the curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structure with different elastic moduli and growth temperatures. Several special forms and applications are given.

Research Organization:
Department of Physics, Peking University, Peking, China
OSTI ID:
6801609
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 54:1; ISSN JAPIA
Country of Publication:
United States
Language:
English

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