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Compact repetitively pulsed excimer laser

Journal Article · · Rev. Sci. Instrum.; (United States)
DOI:https://doi.org/10.1063/1.1137355· OSTI ID:6798502
An excimer laser is described with a gain volume of 20 cm/sup 3/ and capable of repetition rates on the order of 10 Hz using a simple pulse-charge circuit and gas flow loop. With gas mixtures typical of the XeCl species, maximum single-pulse output energies of 15 mJ are obtained at charge voltages of 30 kV and run times are on the order of hours for a single gas fill.
Research Organization:
Northrop Corporation, Northrop Research and Technology Center, One Research Park, Palos Verdes Peninsula, California 90274
OSTI ID:
6798502
Journal Information:
Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 54:2; ISSN RSINA
Country of Publication:
United States
Language:
English

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