Microscopic structure of the SiO/sub 2//Si interface
The bonding of Si atoms at the SiO/sub 2//Si interface is determined via high-resolution core-level spectroscopy with use of synchrotron radiation. All four oxidation states of Si are resolved, and their distribution is measured for Si(100) and Si(111) substrates. For oxides grown in pure O/sub 2/, the density of Si atoms in intermediate oxidation states is (1.5 +- 0.5) x 10/sup 15/ cm/sup -2/. This value is obtained by measuring the core-level intensity, the escape depth in Si and SiO/sub 2/, and the relative Si 2p photoionization cross section for different oxidation states. From the density and distribution of intermediate-oxidation states, models of the interface structure are obtained. The interface is not abrupt, as evidenced by the high density of intermediate-oxidation states (about two monolayers of Si) and by their nonideal distribution. The finite width of the interface is explained by the bond-density mismatch between SiO/sub 2/ and Si. The electrical properties of the interface (band lineup, Fermi, and vacuum level) are determined. Annealing in H/sub 2/ is found to influence the electrical parameters by removing the P/sub b/ centers that pin the Fermi level. The distribution of oxidation states is not affected.
- Research Organization:
- IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
- OSTI ID:
- 6780702
- Journal Information:
- Phys. Rev. B: Condens. Matter; (United States), Journal Name: Phys. Rev. B: Condens. Matter; (United States) Vol. 38:9; ISSN PRBMD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360603* -- Materials-- Properties
ATOMS
BREMSSTRAHLUNG
CHALCOGENIDES
CHEMICAL BONDS
CROSS SECTIONS
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELEMENTS
INTERFACES
IONIZATION
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PHOTOIONIZATION
PHYSICAL PROPERTIES
RADIATIONS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
STRUCTURAL MODELS
SYNCHROTRON RADIATION