Investigation of buried homojunctions in p -InP formed during sputter deposition of both indium tin oxide and indium oxide

Journal Article · Tue May 01 04:00:00 EDT 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576825· OSTI ID:6772878

Gessert, T A; Li, X; Wanlass, M W; Nelson, A J; Coutts, T J ^[1]

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1. Solar Energy Research Institute, Golden, CO (USA)

Although it is apparent that direct current (dc) magnetron sputter deposition of indium tin oxide (ITO) leads to the formation of a buried homojunction in single crystal {ital p}-type InP, the actual mechanism of type conversion of the InP surface is not clear, nor is it immediately obvious how further improvements may be achieved. Previously, we have suggested that type conversion is caused by indiffusion of Sn during the ITO deposition process and additionally demonstrated that this effect is strengthened by the presence of hydrogen in the sputtering gas. Recently, however, efficiencies of almost 17% (Global) have been achieved for cells fabricated by sputter depositing In{sub 2}O{sub 3}(IO) alone, strongly suggesting that the Sn may not be an essential part of type conversion. In this work, a variety of electrical and optical techniques has been used to assess the changes at the ITO/InP and IO/InP interfaces. From these, it is concluded that several mechanisms, including passivation of acceptors by hydrogen and sputter damage,'' occur simultaneously. This analysis suggests several directions for further improvement of these devices.

• DOE Contract Number: AC02-83CH10093
• OSTI ID: 6772878
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:3; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CHALCOGENIDES
COATINGS
DIFFUSION
DIRECT ENERGY CONVERTERS
EQUIPMENT
HOMOJUNCTIONS
INDIUM COMPOUNDS
INDIUM OXIDES
INDIUM PHOSPHIDE SOLAR CELLS
INDIUM PHOSPHIDES
INTERFACES
JUNCTIONS
OXIDES
OXYGEN COMPOUNDS
PASSIVATION
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
SEMICONDUCTOR JUNCTIONS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
TIN COMPOUNDS
TIN OXIDES
VAPOR DEPOSITED COATINGS