HTS SNS devices on large-area substrates by single-source MOCVD. Final report, 4 June 1993-28 February 1994
Technical Report
·
OSTI ID:6766194
A novel, single-source metalorganic chemical vapor deposition (SSMOCVD) technique has shown exceptional promise for the growth of epitaxial oxide films and multilayers on large area substrates, as needed for the commercial-scale production of high temperature superconductor devices and circuits. In this contract the SSMOCVD technique was applied to growth of YBa2Cu307-x and CaRuO3 films and multilayers for the fabrication of superconductor-normal-superconductor Josephson junctions. A process was developed for the growth of epitaxial CaRuO3 films by SSMOCVD, which was the first reported growth of CaRuO3 by MOCVD. Also, a process was developed for the in situ growth of epitaxial YBa2Cu307-x/CaRuO3 multilayers by SSMOCVD. Finally, epitaxial SNS edge junctions were fabricated and tested which used a top YBCO/CaRuo3 bilayer grown in situ by SSMOCVD and a base SrTiO3/YBa2Cu3O7-x bilayer grown in situ by pulsed laser ablation.
- Research Organization:
- Conductus, Inc., Sunnyvale, CA (United States)
- OSTI ID:
- 6766194
- Report Number(s):
- AD-A-285159/0/XAB; CNN: DASG60-93-C-0118
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DOCUMENT TYPES
FILMS
HIGH-TC SUPERCONDUCTORS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PROGRESS REPORT
SUBSTRATES
SUPERCONDUCTORS
SURFACE COATING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DOCUMENT TYPES
FILMS
HIGH-TC SUPERCONDUCTORS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PROGRESS REPORT
SUBSTRATES
SUPERCONDUCTORS
SURFACE COATING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES