Optical constants of sputter-deposited Ti-Ce oxide and Zr-Ce oxide films

Journal Article · Tue Sep 01 04:00:00 EDT 1998 · Applied Optics

DOI:https://doi.org/10.1364/AO.37.005993· OSTI ID:675099

Veszelei, M; Kullman, L; Granqvist, C G ^[1]; von Rottkay, N; Rubin, M ^[2]

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1. Department of Materials Science, The ngstroem Laboratory, Uppsala University, P.O. Box 534, S-751 21 Uppsala (Sweden)
2. Lawrence Berkeley National Laboratory, University of California at Berkeley, Berkeley, California 94720 (United States)

Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants {ital n} and {ital k} were evaluated from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that {ital n} for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas {ital k} in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects. {copyright} 1998 Optical Society of America

• Research Organization: Lawrence Berkeley National Laboratory
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 675099
• Journal Information: Applied Optics, Journal Name: Applied Optics Journal Issue: 25 Vol. 37; ISSN 0003-6935; ISSN APOPAI
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CERIUM OXIDES
INFRARED SPECTRA
LIGHT TRANSMISSION
REFLECTIVITY
REFRACTIVE INDEX
SPECTROPHOTOMETRY
THIN FILMS
TITANIUM OXIDES
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA
ZIRCONIUM OXIDES