Effect of oxygen on compositionally modulated Gd-Co thin films
Journal Article
·
· J. Appl. Phys.; (United States)
We report on a study of the effect of oxygen on the chemical and structural stability of compositionally modulated Gd-Co multilayer films. Films with bilayer periods (BP) from 10 to 300 A were prepared by alternate deposition in a multitarget RF diode sputtering system. Oxygen incorporation in the films was controlled during deposition by the application of rf substrate bias, and after deposition by annealing. Oxygen preferentially accumulated in the Gd layer and blocked its diffusion. Co columnar grain growth in samples with large BP appears to be associated with the asymmetric diffusion between the Gd and Co layers. TEM of samples with small BP showed a void network structure in the samples sputtered with 0 V substrate bias, but showed a phase separated amorphous structure in the samples sputtered with 65 V substrate bias. Annealing suppressed the growth of crystalline Gd and Co in samples with oxygen but enhanced the nucleation of GdCo/sub 2/. A strong growth of Co and Gd grains occurred in annealed samples with low oxygen content but GdCo/sub 2/ was not observed. Cross-section TEM showed that the growth of these grains was limited by the layer boundaries.
- Research Organization:
- Center for Materials Science and Engineering, The University of Texas, Austin, Texas 78712
- OSTI ID:
- 6747440
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:10; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ANISOTROPY
ANNEALING
CHEMICAL REACTIONS
COBALT
COHERENT SCATTERING
DIFFRACTION
DIFFUSION
ELEMENTS
FILMS
GADOLINIUM
HEAT TREATMENTS
LAYERS
MAGNETIC PROPERTIES
METALS
OXIDATION
PHYSICAL PROPERTIES
RARE EARTHS
SCATTERING
THIN FILMS
TRANSITION ELEMENTS
X-RAY DIFFRACTION
360104* -- Metals & Alloys-- Physical Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ANISOTROPY
ANNEALING
CHEMICAL REACTIONS
COBALT
COHERENT SCATTERING
DIFFRACTION
DIFFUSION
ELEMENTS
FILMS
GADOLINIUM
HEAT TREATMENTS
LAYERS
MAGNETIC PROPERTIES
METALS
OXIDATION
PHYSICAL PROPERTIES
RARE EARTHS
SCATTERING
THIN FILMS
TRANSITION ELEMENTS
X-RAY DIFFRACTION