Effect of bias sputtering on magnetic properties and structure of compositionally modulated Tb/sub 32/Fe/sub 68/ films
Conference
·
· IEEE (Institute of Electrical and Electronics Engineers) Transactions on Magnetics; (USA)
OSTI ID:5180807
- Texas Univ., Austin, TX (USA)
Amorphous Tb/sub 32/Fe/sub 68/ compositionally modulated films (CMFs) were prepared in a multi-target rf diode sputtering system. Independent control of the rf voltage ratios of both the Tb and Fe targets allowed the composition of the film to be held constant as the substrate bias was changed. Cross-sectional TEM showed that small scale atomic clusters were aligned in layers. The authors describe how bias sputtering appeared to enhance the magnetic and magneto-optical properties and modified the film structure from a columnar void morphology to a dense, featureless morphology.
- OSTI ID:
- 5180807
- Report Number(s):
- CONF-890309--
- Conference Information:
- Journal Name: IEEE (Institute of Electrical and Electronics Engineers) Transactions on Magnetics; (USA) Journal Volume: 25:5
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
360104* -- Metals & Alloys-- Physical Properties
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELEMENTS
FILMS
IRON ALLOYS
MAGNETIC PROPERTIES
METALS
MICROSCOPY
MICROSTRUCTURE
OPTICAL PROPERTIES
OXIDATION
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE EARTHS
SPUTTERING
TERBIUM
TERBIUM ALLOYS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
360101 -- Metals & Alloys-- Preparation & Fabrication
360104* -- Metals & Alloys-- Physical Properties
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELEMENTS
FILMS
IRON ALLOYS
MAGNETIC PROPERTIES
METALS
MICROSCOPY
MICROSTRUCTURE
OPTICAL PROPERTIES
OXIDATION
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE EARTHS
SPUTTERING
TERBIUM
TERBIUM ALLOYS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY